DocumentCode
556808
Title
Improve run-to-run controllers using multivariate projection methods
Author
Byrne, Tamara
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
13
Abstract
Presents a collection of slides covering the following topics: run-to-run controllers; multivariate projection methods; design of experiments; PLS diagnostics; quality assurance; process control; quality control and virtual metrology.
Keywords
design of experiments; quality control; statistical process control; PLS diagnostics; design of experiments; multivariate projection methods; process control; quality assurance; quality control; run-to-run controllers; virtual metrology; Aerospace electronics; Metrology; US Department of Energy;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086035
Link To Document