Title :
Study on lamp heating system for SiGe selective epitaxial growth fabrication process
Author :
Chang, Chih-Tien
Author_Institution :
Manuf. Technol. Center, Taiwan Semicond. Manuf. Co., Ltd., Hsinchu, Taiwan
Abstract :
A collection of slides about lamp heating system for SiGe selective epitaxial growth fabrication process is presented.
Keywords :
Ge-Si alloys; epitaxial growth; heating; lamps; SiGe; fabrication process; lamp heating system; selective epitaxial growth; Collaboration; Epitaxial growth; Heating; Joints; Manufacturing; Silicon germanium;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
