Title :
FDC real-time monitor enhancement
Abstract :
A collection of slides from the author´s seminar presentation is given. The following topics are discussed: FDC/WAT correlation; application of PCA, FA and ANCOVA; and factor analysis.
Keywords :
covariance analysis; fault diagnosis; integrated circuit manufacture; integrated circuit testing; principal component analysis; ANCOVA; FA; FDC real-time monitor enhancement; FDC-WAT correlation; PCA; factor analysis; fault classification; fault detection; wafer acceptance test; Analytical models; Correlation; Monitoring; Principal component analysis; Real time systems; Vectors;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
