DocumentCode
556820
Title
FDC real-time monitor enhancement
Author
Chu, Jade
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
12
Abstract
A collection of slides from the author´s seminar presentation is given. The following topics are discussed: FDC/WAT correlation; application of PCA, FA and ANCOVA; and factor analysis.
Keywords
covariance analysis; fault diagnosis; integrated circuit manufacture; integrated circuit testing; principal component analysis; ANCOVA; FA; FDC real-time monitor enhancement; FDC-WAT correlation; PCA; factor analysis; fault classification; fault detection; wafer acceptance test; Analytical models; Correlation; Monitoring; Principal component analysis; Real time systems; Vectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086047
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