DocumentCode
556826
Title
Breakthrough for CW management and operation model in 200mm FAB by specialization technician
Author
Chen, Y.H. ; Wang, C.L. ; Ho, M.Y.
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
0
Lastpage
17
Abstract
Presents a collection of slides covering the following topics: CW management; central monitor center; specific monitor group; auto-sorter; premeasurement value inheritance; and control wafer transports.
Keywords
materials handling; semiconductor device manufacture; wafer-scale integration; CW management; auto-sorter; central monitor center; control wafer transports; operation model; premeasurement value inheritance; specific monitor group; Dispatching; Loading; Monitoring; Productivity; Recycling; Schedules; Security;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086053
Link To Document