• DocumentCode
    556827
  • Title

    Optimizing information value for supporting production decisions for semiconductor manufacturing

  • Author

    Chien, Cheng-Chung ; Hsu, Chia-Yu ; Chiou, Noah ; Chien, Chen-Fu ; Hsin, Wan-Min ; Lee, Ching-Yang ; Chien, Jason ; Wu, Alan

  • Author_Institution
    Fab 3, Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan
  • fYear
    2011
  • fDate
    5-6 Sept. 2011
  • Firstpage
    1
  • Lastpage
    11
  • Abstract
    This study aims to develop an optimization model of information integration (OMII) for determining the combination of high-priority lots to maximize information coverage for monitoring the whole process effectively. 1) Establishing measure of the information value 2) Constructing selection logic and algorithms 3) Selecting the combination of high-priority lots with maximum information value for obtain the best technology coverage index and KeyKPI.
  • Keywords
    decision making; performance index; process monitoring; production management; semiconductor device manufacture; semiconductor industry; KeyKPI; OMII; algorithms; high-priority lots combination; information coverage; information value optimization; optimization model of information integration; process monitoring; production decisions; selection logic construction; semiconductor manufacturing; technology coverage index; Companies; Indexes; Manufacturing; Monitoring; Optimization; Production; Semiconductor device measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4577-1647-8
  • Type

    conf

  • Filename
    6086054