Title :
Digitized service contents for process & equipment engineering
Author :
Kobayashi, Shigeru
Author_Institution :
Process Technology Division, Renesas Electronics Corporation
Abstract :
This paper presents a collection of slides covering the following topics: failure mode and effects analysis knowledge and service contents; concrete engineering knowledge and service contents for process quality control and management; and deployment of knowledge as engineering contents.
Keywords :
quality control; semiconductor device manufacture; concrete engineering knowledge; digitized service contents; engineering contents; equipment engineering; failure mode and effects analysis knowledge; knowledge deployment; process engineering; process quality control; process quality management; Closed loop systems; Concrete; Knowledge engineering; Manufacturing; Monitoring; Process control; Quality control;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
