Title :
End point detection on the time series process data
Author :
Kuramochi, Nobuichi
Author_Institution :
Toshiba Corporation
Abstract :
A collection of slides from the author´s conference presentation about the end point detection on the time series process data is presented.
Keywords :
semiconductor device manufacture; time series; end point detection; time series process data; Collaboration; Joints; Manufacturing; Monitoring; Noise; Time series analysis; Torque;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
