DocumentCode
556838
Title
End point detection on the time series process data
Author
Kuramochi, Nobuichi
Author_Institution
Toshiba Corporation
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
10
Abstract
A collection of slides from the author´s conference presentation about the end point detection on the time series process data is presented.
Keywords
semiconductor device manufacture; time series; end point detection; time series process data; Collaboration; Joints; Manufacturing; Monitoring; Noise; Time series analysis; Torque;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086065
Link To Document