DocumentCode
556847
Title
A study of optimal optical inspection condition regarding micro periodic structure
Author
Sekiya, Harutaka
Author_Institution
Samsung Yokohama Research Institute
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
10
Abstract
A collection of slides from the author´s conference presentation about the optimal optical inspection condition regarding micro periodic structure is presented.
Keywords
inspection; semiconductor device manufacture; semiconductor industry; microperiodic structure; optimal optical inspection condition; Collaboration; Extinction coefficients; Finite difference methods; Joints; Slabs; Time domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086074
Link To Document