Title :
A study of optimal optical inspection condition regarding micro periodic structure
Author :
Sekiya, Harutaka
Author_Institution :
Samsung Yokohama Research Institute
Abstract :
A collection of slides from the author´s conference presentation about the optimal optical inspection condition regarding micro periodic structure is presented.
Keywords :
inspection; semiconductor device manufacture; semiconductor industry; microperiodic structure; optimal optical inspection condition; Collaboration; Extinction coefficients; Finite difference methods; Joints; Slabs; Time domain analysis;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
