DocumentCode
556850
Title
A Rosebrock´s diagonal dominance study on multiple resolution APC
Author
Tsen, Andy
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
7
Abstract
A collection of slides from the Andy Tsen´s conference presentation about a Rosebrock´s diagonal dominance study on multiple resolution APC is presented.
Keywords
chemical mechanical polishing; semiconductor device manufacture; semiconductor industry; CMP; Rosebrock; diagonal dominance study; multiple resolution APC; Equations; Indexes; Mathematical model; Metrology; Signal resolution; Stability criteria;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086077
Link To Document