Title :
Semiconductor tool monitor by integrating defect signatures and in-line WIP
Author :
Maheshwary, Sonu ; Ying, Hai ; Yong, Poh-Boon
Abstract :
A collection of slides is presented by the author. Semiconductor manufacturing is discussed.
Keywords :
semiconductor device manufacture; defect signatures; in-line WIP; semiconductor manufacturing; semiconductor tool monitor; Handwriting recognition; IEEE Potentials; Monitoring; Production; Real time systems; Servers;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
