Title :
Synthesis of nanostructured TiO2 on transparent substrate by anodization of Ti thin films
Author :
Manea, E. ; Purica, M. ; Budianu, E. ; Obreja, A.C. ; Dinescu, A.
Author_Institution :
Nat. Inst. for R&D in Microtechnologies-IMT Bucharest, Bucharest, Romania
Abstract :
The paper presents the obtaining of nanostructured TiO2 layers on glass and ITO/glass substrate by anodization in ammonium fluoride + ethylene glycol, as electrolyte. Anodic oxidation process of metallic Ti thin films was investigated by studying the changes in the surface morphology (SEM analysis) and in optical properties of the obtained TiO2 layers transmittance spectra over the 200-900 nm spectral range).
Keywords :
anodisation; electrolytes; infrared spectra; nanofabrication; nanostructured materials; oxidation; scanning electron microscopy; semiconductor materials; surface morphology; titanium compounds; ultraviolet spectra; visible spectra; ITO-SiO2; SEM; TiO2; UV-vis-NIR transmission spectra; ammonium fluoride; anodic oxidation; anodization; electrolyte; ethylene glycol; glass substrate; metallic thin films; nanostructured materials; optical properties; surface morphology; transmittance spectra; Glass; Nanotubes; Optical films; Scanning electron microscopy; Surface treatment; Titanium; Scanning Electron Microscopy; Ti films; TiO2 nanoporous layer; anodic oxidation;
Conference_Titel :
Semiconductor Conference (CAS), 2011 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-61284-173-1
DOI :
10.1109/SMICND.2011.6095713
