Design of feed-forward ΣΔ interface for MEMS based accelerometers

Author

Liang, Wenquan ; Yang, Changchun ; Qiao, Donghai

Author_Institution

Inst. of Geol. & Geophys., Beijing, China

Volume

4

fYear

2011

fDate

15-17 Oct. 2011

Firstpage

2153

Lastpage

2158

Abstract

High order ΣΔ interface is a practical choice for high resolution MEMS sensors. Previous researches are mainly about the determination of the coefficients of multiple feedback ΣΔ interfaces. In the work presented here, a systematic method for the design of feed forward ΣΔ interface is proposed. Simulations show that the utilizing the proposed method, feed forward method and the traditional multiple feedback structures have almost the same peak SQNRs when a compensator pole is added to the feed forward structure. However, feed forward structure has many advantages, so the proposed method is a promising alternative method for the multiple feedback structure.

Keywords

accelerometers; sigma-delta modulation; MEMS based accelerometers; MEMS sensors; feed-forward sigma delta interface; multiple feedback structure; Feeds; Frequency modulation; Gain; Micromechanical devices; Noise; Sensors; Analog to Digital Conversion; Feed forward Sigma-Delta interface; MEMS; compensation filter; inertial accelerometer; optimal coefficients;

fLanguage

English

Publisher

ieee

Conference_Titel

Image and Signal Processing (CISP), 2011 4th International Congress on

Conference_Location

Shanghai

Print_ISBN

978-1-4244-9304-3

Type

conf

DOI

10.1109/CISP.2011.6100617

Filename

6100617