Dual-band 60/77 GHz MEMS antenna on high-resistivity silicon

A novel MEMS antenna is introduced in this paper. This antenna is capable of operating at both 60 GHz and 77 GHz. The proposed antenna enjoys good isolation from the driving circuit, low fabrication cost, and high mechanical stability. These features are achieved together via a new fabrication technology that allows the realization of MEMS antennas with ground plane isolation from the driving circuits using one silicon wafer only. The new antenna is rigorously characterized via two well-known software packages. Based on the very good agreement between them, it can be concluded that the proposed antenna is resonating at the desired two frequencies, radiating almost isotropicaly from one side of the substrate with good front-to-back ratio, providing low cross-polarization level, and enjoying high gain and very high radiation efficiency at both frequencies of operation.