Title :
Influence of beam geometry on the dielectric charging of RF MEMS switches
Author :
Solazzi, Francesco ; Resta, Giuseppe ; Mulloni, Viviana ; Margesin, Benno ; Farinelli, Paola
Author_Institution :
MEMS Group, Fondazione Bruno Kessler, Povo, Italy
Abstract :
This paper reports on the evolution of electromechanical properties of dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based on a clamped-clamped air bridge and the other on a cantilever beam, are characterized and compared by monitoring pull-in and pull-out voltages after a long-time application of different bias voltages. Results show that the beam shape assumed after the snap-down may affect the lifetime of the switch.
Keywords :
beams (structures); cantilevers; electromechanical effects; microswitches; stress analysis; beam geometry; beam shape; bias voltages; cantilever beam; clamped-clamped air bridge; dielectric charging; dielectric-less RF MEMS switches; electromechanical property; long-term stress conditions; pull-in voltages; pull-out voltages; snap-down; switch lifetime; Bridge circuits; Dielectrics; Micromechanical devices; Radio frequency; Stress; Switches; Voltage measurement;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2011 European
Conference_Location :
Manchester
Print_ISBN :
978-1-61284-236-3
