Title :
Design, fabrication and measurements of reliable low voltage RF-MEMS switched varactors
Author :
Gauvin, J. ; Barrière, F. ; Mardivirin, D. ; Pothier, A. ; Crunteanu, A. ; Blondy, P. ; Vendier, O. ; Cazaux, J.L.
Author_Institution :
XLIM, Univ. de Limoges, Limoges, France
Abstract :
A reliable low actuation voltage RF-MEMS switch is fabricated following a very simple design technique. Using well-known electrostatic RF-MEMS equations, it is experimentally demonstrated that both low actuation voltage and high reliability RF-MEMS switches can be easily achieved. As an example, a 6.8V switch is fabricated and tested. The measured on/off capacitive ratio on this component is 5.2. A reliability study has been done on this component showing very low drifts, less than 1V after 4hours in the down state under bipolar low voltage bias.
Keywords :
electrostatics; microswitches; reliability; varactors; bipolar low voltage bias; electrostatic RF-MEMS equation; low actuation voltage RF-MEMS switched varactor; on-off capacitive ratio measurement; time 4 hour; voltage 6.8 V; Low voltage; Micromechanical devices; Optical switches; Reliability; Sensitivity; Low voltage; RF-MEMS; Reliability;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2011 European
Conference_Location :
Manchester
Print_ISBN :
978-1-61284-236-3
