A novel reconfigurable impedance matching network using tunable MEMS capacitive and inductive components

A novel reconfigurable impedance matching network suitable for tunable RF front-ends is presented. The network is based on a transmission line loaded with 8 dual state MEMS capacitive and inductive devices and achieves 256 different impedance states. The application of both the capacitive and inductive elements results in a more uniformly distribution of the impedance states on the Smith chart compared to the conventional DMTL matching networks. The fabricated network on alumina substrate is compact (4.0 × 1.9 mm2) and demonstrates good performance in terms of impedance coverage for a frequency band from 8 GHz up to 14 GHz with a low insertion loss.