A zero-level packaged RF-MEMS switch with large contact force

Author

Barrière, Fabien ; Pothier, Arnaud ; Crunteanu, Aurélian ; Chatras, Matthieu ; Blondy, Pierre

Author_Institution

XLIM Res. Inst., Univ. de Limoges, Limoges, France

fYear

2011

fDate

10-11 Oct. 2011

Firstpage

668

Lastpage

671

Abstract

This paper presents a novel compact RF-MEMS switch with large contact force. The switch can generate forces above 1.3mN, with 45V applied, while keeping a reasonable footprint. The actuator is based on a single metal 280μm diameter disc, that concentrates electrostatic force on a 8×8μm contact area. Zero level packaging is included in the fabrication, by intergating a metal electroplated shell fabricated above the mechanical part of the switch. The measured contact resistance of AuNi/Au contacts is 0.3Ω with 45V applied, and the off state capacitance of the packaged switch is 48fF.

Keywords

electronics packaging; electrostatics; gold compounds; microactuators; microswitches; AuNi-Au; actuator; capacitance 48 fF; contact resistance; electrostatic force; large contact force; metal electroplated shell; off state capacitance; resistance 0.3 ohm; single metal diameter disc; size 280 mum; voltage 45 mV; zero level packaging; zero-level packaged RF-MEMS switch; Actuators; Contact resistance; Force; Metals; Radio frequency; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Integrated Circuits Conference (EuMIC), 2011 European

Conference_Location

Manchester

Print_ISBN

978-1-61284-236-3

Type

conf

Filename

6102908