Study of screen-printing microlens array using electroforming molds

This paper aims to produce micro-lens array by using MEMS technology. It combines LIGA-like technology for micro-lens array fabrication to design and integration of screen-printing process. In the experiment, we found that the working temperature played an important role in shape transfer process. The microlens density and arrangement also affect the mean height of photoresist after thermal reflow. This study uses LIGA-like technologies at the early stage to develop screen-printing mold. Then, the electroforming screen mold can be re-used, that synthetic development of high-mirror high (high sag) micro-lens array, this is an innovative and unique method. The experiment success and make the simple micro-lens manufacturing process, with forming fast, easy to melt, reduce costs and micro-structure, appearance, easy to retain the advantages.