• DocumentCode
    559581
  • Title

    Electrical and mechanical characterization of lateral NEMS Switches

  • Author

    Hinchet, R. ; Montès, L. ; Bouteloup, G. ; Ardila, G. ; Parsa, R. ; Akarvardar, K. ; Howe, R.T. ; Wong, H. -S Philip

  • Author_Institution
    IMEP-LAHC, Grenoble Inst. of Technol., Grenoble, France
  • fYear
    2011
  • fDate
    11-13 May 2011
  • Firstpage
    348
  • Lastpage
    351
  • Abstract
    In this paper we present a study on the electrical and mechanical characterization of NEMS Nano Switches. Pull-in, pull-out voltages are in good agreement with the theoretical values. However some reliability and sticking problems are identified. To investigate furthermore the mechanical properties of the nanoswitch (NS) beam, we have developed a dedicated AFM methodology to extract the Young´s modulus. A further improvement of the design is then realized based on the results of this study.
  • Keywords
    Young´s modulus; microswitches; nanoelectromechanical devices; NEMS nano switches; Young´s modulus; electrical characterization; lateral NEMS switches; mechanical characterization; nanoswitch beam; Force; Nanoelectromechanical systems; Nanowires; Scanning electron microscopy; Silicon; Structural beams; Young´s modulus; AFM; NEMS; Nano-switches; Young´s modulus; mechanical characterization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
  • Conference_Location
    Aix-en-Provence
  • Print_ISBN
    978-1-61284-905-8
  • Type

    conf

  • Filename
    6107990
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=559581