Title :
Electrical and mechanical characterization of lateral NEMS Switches
Author :
Hinchet, R. ; Montès, L. ; Bouteloup, G. ; Ardila, G. ; Parsa, R. ; Akarvardar, K. ; Howe, R.T. ; Wong, H. -S Philip
Author_Institution :
IMEP-LAHC, Grenoble Inst. of Technol., Grenoble, France
Abstract :
In this paper we present a study on the electrical and mechanical characterization of NEMS Nano Switches. Pull-in, pull-out voltages are in good agreement with the theoretical values. However some reliability and sticking problems are identified. To investigate furthermore the mechanical properties of the nanoswitch (NS) beam, we have developed a dedicated AFM methodology to extract the Young´s modulus. A further improvement of the design is then realized based on the results of this study.
Keywords :
Young´s modulus; microswitches; nanoelectromechanical devices; NEMS nano switches; Young´s modulus; electrical characterization; lateral NEMS switches; mechanical characterization; nanoswitch beam; Force; Nanoelectromechanical systems; Nanowires; Scanning electron microscopy; Silicon; Structural beams; Young´s modulus; AFM; NEMS; Nano-switches; Young´s modulus; mechanical characterization;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
