Investigation on the effect of geometrical dimensions on the conductive behaviour of a MEMS convective accelerometer

This paper presents an investigation on the effect of geometrical dimensions on the conductive behaviour of a CMOS MEMS convective accelerometer. Numerous FEM simulations are conducted to prove the validity of a previously developed model. This model was firstly developed to represent the effect of only one geometrical parameter; the etched cavity depth. We prove here that this model may represent also the effect of other geometrical parameters, the cavity half-width and the package height, on the conductive behaviour of the sensor.