Title :
A closed-loop micromachined accelerometer based on thermal convection
Author :
Garraud, Alexandra ; Combette, Philippe ; Charlot, Benoît ; Loisel, Pierre ; Giani, Alain
Author_Institution :
Inst. d´´Electron. du Sud, Univ. Montpellier 2, Montpellier, France
Abstract :
In this work, we present the frequency analysis of a micromachined thermal accelerometer based on convection. Open-loop block diagram representation is first introduced to explain the sensor behavior. New sensor architecture is imagined to enhance sensor characteristics: a closed-loop configuration is designed by addition of two resistors closed to detectors. Effects on thermal sensitivity and bandwidth are investigated.
Keywords :
accelerometers; convection; micromachining; temperature sensors; closed-loop configuration; closed-loop micromachined accelerometer; frequency analysis; micromachined thermal accelerometer; open-loop block diagram representation; resistors; thermal bandwidth; thermal convection; thermal sensitivity; Acceleration; Accelerometers; Bandwidth; Detectors; Sensitivity; Temperature measurement; Temperature sensors;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
