Title :
Success in MEMS, “from DRIE technology to social innovation”
Author :
Kaminaga, Susumu
Author_Institution :
Sumitomo Precision Products Co., Ltd., Japan
Abstract :
Many MEMS devices like air-bag sensors and ink jet heads now well-established and are being manufactured in high volumes. DRIE is a key enabling process for manufacturing most silicon-based MEMS. Over the past 15 years DRIE process capability has been continuously improved and developed, to meet the needs of MEMS manufacturers. MEMS devices are now finding new, emerging applications which promise to improve our lives in many other ways such as environmental monitoring and control, energy conservation and harvesting, life sciences and security.
Keywords :
micromechanical devices; silicon; sputter etching; DRIE process capability; DRIE technology; air-bag sensor; deep reactive ion etching; energy conservation; environmental control; environmental monitoring; harvesting; ink jet heads; life sciences; security; silicon-based MEMS manufacturing; social innovation; Biomedical monitoring; Electromagnetics; Immune system; Micromechanical devices; Monitoring; Temperature sensors;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
