DocumentCode
559600
Title
Fabrication methods for the manufacture of sapphire microparts
Author
Allen, David M. ; Redondo, R. ; Dany, Maximilien
Author_Institution
Precision Eng. Centre, Cranfield Univ., Cranfield, UK
fYear
2011
fDate
11-13 May 2011
Firstpage
29
Lastpage
34
Abstract
There is an increasing demand for microparts to be fabricated from an extremely hard-wearing, durable material such as sapphire but machining it to demanding specifications and tolerances poses considerable challenges. This paper describes experimental results obtained from laser machining and diamond machining of sapphire and concludes that, for optimum machining, a combination of these two techniques is required.
Keywords
laser beam machining; micromachining; sapphire; diamond machining; durable material; laser machining; microparts fabrication methods; sapphire microparts manufacture; Diamond-like carbon; Fiber lasers; Machining; Rough surfaces; Surface cracks; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location
Aix-en-Provence
Print_ISBN
978-1-61284-905-8
Type
conf
Filename
6108012
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