Title : 
Fabrication methods for the manufacture of sapphire microparts
         
        
            Author : 
Allen, David M. ; Redondo, R. ; Dany, Maximilien
         
        
            Author_Institution : 
Precision Eng. Centre, Cranfield Univ., Cranfield, UK
         
        
        
        
        
        
            Abstract : 
There is an increasing demand for microparts to be fabricated from an extremely hard-wearing, durable material such as sapphire but machining it to demanding specifications and tolerances poses considerable challenges. This paper describes experimental results obtained from laser machining and diamond machining of sapphire and concludes that, for optimum machining, a combination of these two techniques is required.
         
        
            Keywords : 
laser beam machining; micromachining; sapphire; diamond machining; durable material; laser machining; microparts fabrication methods; sapphire microparts manufacture; Diamond-like carbon; Fiber lasers; Machining; Rough surfaces; Surface cracks; Surface roughness;
         
        
        
        
            Conference_Titel : 
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
         
        
            Conference_Location : 
Aix-en-Provence
         
        
            Print_ISBN : 
978-1-61284-905-8