Title :
Reduced order modelling of MEMS dynamics
Author :
Mariani, Stefano ; Azam, Saeed Eftekhar ; Ghisi, Aldo ; Corigliano, Alberto ; Simoni, Barbara
Author_Institution :
Dipt. di Ing. Strutturale, Politec. di Milano, Milan, Italy
Abstract :
The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up.
Keywords :
accelerometers; finite element analysis; micromechanical devices; reduced order systems; MEMS dynamics; MEMS response; accidental drop events; reduced order modelling; three-dimensional finite element model; uniaxial microaccelerometer; Acceleration; Accelerometers; History; Micromechanical devices; Sensors; Springs; Stress;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
