• DocumentCode
    559609
  • Title

    Amplitude enhancement using vibration mode localization with a single micro-mechanically coupled beam-shaped resonator array

  • Author

    Chatani, Keisuke ; Wang, Dong F. ; Ikehara, Tsuyoshi ; Maeda, Ryutaro

  • Author_Institution
    Micro Eng. & Micro Syst. Lab., Ibaraki Univ. (Coll. of Eng.), Hitachi, Japan
  • fYear
    2011
  • fDate
    11-13 May 2011
  • Firstpage
    339
  • Lastpage
    343
  • Abstract
    The use of vibration mode localization in arrays of micro-mechanically coupled, nearly identical beam-shaped resonators has been studied for ultrasensitive mass detection and analyte identification. Eigenstate shifts that are 3 to 4 times (compared to single resonator), and orders (compared to resonator array) of magnitude greater than corresponding shifts in resonant frequency for an induced mass perturbation are theoretically analyzed, from the view points of geometrical design of the coupling overhang, cantilever length, as well as number of the identical coupled cantilevers. Furthermore, the shifts in eigenstates are unique to the resonator to which the stiffness or mass perturbation is induced, therefore providing a characteristic “fingerprint” that identifies the particular resonator where the stiffness or mass perturbation is induced.
  • Keywords
    beams (structures); cantilevers; micromechanical devices; resonators; vibrations; amplitude enhancement; cantilever length; coupling overhang; eigenstate shifts; geometrical design; mass perturbation; micro-mechanically coupled beam-shaped resonator array; ultrasensitive mass detection; vibration mode localization; Arrays; Resonant frequency; Sensors; Silicon; Amplitude enhancement; Analyte identification; Coupled resonator array; Coupling overhang; Eigenstate shifts; Ultrasensitive mass detection; Vibration mode localization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
  • Conference_Location
    Aix-en-Provence
  • Print_ISBN
    978-1-61284-905-8
  • Type

    conf

  • Filename
    6108021