Title :
Studies of optical and crystal properties of ALD grown ZnO
Author :
Elam, David ; Nemashkalo, Anastasiia ; Strzhemechny, Yuri ; Chen, Chonglin ; Ayon, Arturo ; Chabanov, Andrey
Author_Institution :
Dept. of Phys. & Astron., Univ. of Texas San Antonio, San Antonio, TX, USA
Abstract :
In this paper, we report structural and photoluminescence properties of ZnO thin films grown on single crystal ZnO substrates by means of Atomic Layer Deposition (ALD).
Keywords :
II-VI semiconductors; atomic layer deposition; crystal structure; photoluminescence; semiconductor growth; semiconductor thin films; wide band gap semiconductors; zinc compounds; ZnO; atomic layer deposition; crystal properties; optical properties; photoluminescence; single crystal substrates; thin films; Doping; Films; Lattices; Substrates; X-ray diffraction; X-ray scattering; Zinc oxide;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
