Title :
A model for two-dimensional arrays of cantilevers in the dynamic regime
Author :
Hui, Hui ; Lenczner, M.
Author_Institution :
Sch. of Mechatron., Northwestern Polytech. Univ., Xi´´an, China
Abstract :
We present a model for two-dimensional arrays of micro-cantilevers in elasto-dynamical regime. It has been derived by a two-scale approximation method related to strongly heterogeneous system. We also report validation results regarding its modal structure compared with the one of a direct Finite Element Model (FEM).
Keywords :
cantilevers; finite element analysis; micromechanical devices; 2D arrays; direct finite element model; dynamic regime; elasto-dynamical regime; heterogeneous system; microcantilevers; modal structure; Approximation methods; Computational modeling; Eigenvalues and eigenfunctions; Equations; Finite element methods; Mathematical model; Numerical models;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
