DocumentCode
559629
Title
Developing MEMS DC electric current sensor for end-use monitoring of DC power supply
Author
Isagawa, Kohei ; Wang, Dong F. ; Kobayashi, Takeshi ; Itoh, Toshihiro ; Maeda, Ryutaro
Author_Institution
Coll. of Eng., Micro Eng. & Micro Syst. Lab., Ibaraki Univ., Hitachi, Japan
fYear
2011
fDate
11-13 May 2011
Firstpage
231
Lastpage
236
Abstract
A non-drive, non-contact MEMS DC electric current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord has been proposed. A micro magnet is integrated into the MEMS-scale DC sensor and the appropriate position for locating the micro magnet has been theoretically pinpointed. A macro-scale prototype DC sensor was therefore fabricated, and an impulse piezoelectric voltage output can be clearly detected out when a DC electric current was applied to a two-wire electrical appliance cord. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was further obtained based on the empirical measurements. After the demonstration of the macro-scale prototype DC sensor, the MEMS-scale DC sensor has been then theoretically designed from the view point of reasonable output voltage measurements, and preliminarily micro-fabricated for further characterizations.
Keywords
computerised monitoring; electric sensing devices; microfabrication; micromagnetics; microsensors; power consumption; power supplies to apparatus; voltage measurement; DC power supply; MEMS-scale DC sensor; applied DC electric current; detected peak value; electricity consumption monitoring; empirical measurements; end-use monitoring; impulse output voltage; impulse piezoelectric voltage output; linear relationship; macro-scale prototype DC sensor; micro magnet; microfabrication; non-contact MEMS DC electric current sensor; non-drive MEMS DC electric current sensor; one-wire appliance cord; reasonable output voltage measurements; two-wire appliance cord; Electrodes; Home appliances; Magnetization; System-on-a-chip; Wires; DC power supply; Electricity end-use monitoring; MEMS DC sensor; Non-contact; Non-drive; PZT; Two-wire cord;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location
Aix-en-Provence
Print_ISBN
978-1-61284-905-8
Type
conf
Filename
6108041
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