• DocumentCode
    559629
  • Title

    Developing MEMS DC electric current sensor for end-use monitoring of DC power supply

  • Author

    Isagawa, Kohei ; Wang, Dong F. ; Kobayashi, Takeshi ; Itoh, Toshihiro ; Maeda, Ryutaro

  • Author_Institution
    Coll. of Eng., Micro Eng. & Micro Syst. Lab., Ibaraki Univ., Hitachi, Japan
  • fYear
    2011
  • fDate
    11-13 May 2011
  • Firstpage
    231
  • Lastpage
    236
  • Abstract
    A non-drive, non-contact MEMS DC electric current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord has been proposed. A micro magnet is integrated into the MEMS-scale DC sensor and the appropriate position for locating the micro magnet has been theoretically pinpointed. A macro-scale prototype DC sensor was therefore fabricated, and an impulse piezoelectric voltage output can be clearly detected out when a DC electric current was applied to a two-wire electrical appliance cord. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was further obtained based on the empirical measurements. After the demonstration of the macro-scale prototype DC sensor, the MEMS-scale DC sensor has been then theoretically designed from the view point of reasonable output voltage measurements, and preliminarily micro-fabricated for further characterizations.
  • Keywords
    computerised monitoring; electric sensing devices; microfabrication; micromagnetics; microsensors; power consumption; power supplies to apparatus; voltage measurement; DC power supply; MEMS-scale DC sensor; applied DC electric current; detected peak value; electricity consumption monitoring; empirical measurements; end-use monitoring; impulse output voltage; impulse piezoelectric voltage output; linear relationship; macro-scale prototype DC sensor; micro magnet; microfabrication; non-contact MEMS DC electric current sensor; non-drive MEMS DC electric current sensor; one-wire appliance cord; reasonable output voltage measurements; two-wire appliance cord; Electrodes; Home appliances; Magnetization; System-on-a-chip; Wires; DC power supply; Electricity end-use monitoring; MEMS DC sensor; Non-contact; Non-drive; PZT; Two-wire cord;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
  • Conference_Location
    Aix-en-Provence
  • Print_ISBN
    978-1-61284-905-8
  • Type

    conf

  • Filename
    6108041