Fabrication and characteristics of a fused silica-based optical waveguide with femtosecond fiber laser pulses

This study investigates the fabrication characteristics of a femtosecond fiber laser on a fused-silica-based optical waveguide. The wavelength and repetition rate of the femtosecond fiber laser are 532 nm and 1 MHz, respectively. We selected three main fabrication parameters for systematic adjustment: laser power (E), scanning speed (ν_s) and focus depth (d = 0 at the surface of substrate). We succeeded in fabricating a waveguide layer inside the silica subtracts. By analyzing the light translation path and the net fluence in the waveguide, the range of fabrication energy of the waveguide on the fused silica was kept within 0.973 - 1.438 KJ/cm².