Title :
Behavioural modelling of MEMS oscillators and phase noise simulation
Author :
Papin, G. ; Levy, R. ; Lissorgues, G. ; Poulichet, P.
Author_Institution :
ONERA-DMPH, Chatillon, France
Abstract :
MEMS oscillators offer interesting prospects in terms of performance. Behavioural modelling in Verilog-A and phase noise simulation can help improving the current performances. The proposed macro-model permits multi-physic simulations including mechanical, piezoelectric and electrical analytic descriptions. Phase noise analysis are then performed with this model and compared to the standard Leeson phase noise calculation.
Keywords :
hardware description languages; micromechanical devices; oscillators; phase noise; MEMS oscillators; Verilog-A; behavioural modelling; phase noise simulation; Hardware design languages; Integrated circuit modeling; Mathematical model; Phase noise; Resonant frequency; Transconductance; MEMS; Verilog-A model; oscillator; phase noise; resonator;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
