Title :
Stress identification of thin membrane structures by dynamic measurements
Author :
Michael, Steffen ; Schaffel, Christoph ; Voigt, Sebastian ; Knech, Roy
Author_Institution :
IMMS GmbH, Ilmenau, Germany
Abstract :
A fast identification method of membrane stresses is investigated for an early stage of the manufacturing process. The approach consists of performing optical measurement of the out-of-plane modal responses of the membrane. This information is used in an inverse identification algorithm based on a FE model by an optimization.
Keywords :
membranes; micromechanical devices; stress measurement; vibration measurement; dynamic measurements; inverse identification algorithm; optical measurement; stress identification; thin membrane structures; Approximation methods; Frequency measurement; Polynomials; Reliability; Thickness measurement;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
