Title :
Integration of 45° micromirror in single-mode waveguide
Author :
Inoue, Junichi ; Ogura, Tomonori ; Kintaka, Kenji ; Nishio, Kenzo ; Awatsuji, Yasuhiro ; Ura, Shogo
Author_Institution :
Kyoto Inst. of Technol., Kyoto, Japan
fDate :
Oct. 30 2011-Nov. 2 2011
Abstract :
Micromirrors for high-density coupling between guided waves and free-space waves were integrated in dielectric-glass planar waveguides by using dry etching of trenches and tilt exposure for 45-degree tapers in the water. Input and output coupling efficiencies were experimentally estimated to be 75 % and 60 %, respectively.
Keywords :
etching; germanium compounds; micromirrors; optical couplers; optical fabrication; optical glass; optical planar waveguides; silicon compounds; SiO2-GeO2:SiO2-SiO2; dielectric glass planar waveguides; dry etching; free space waves; guided waves; high density coupling; micromirror; single mode waveguide; Charge coupled devices; Couplers; Gold; Micromirrors;
Conference_Titel :
Microopics Conference (MOC), 2011 17th
Conference_Location :
Sendai
Print_ISBN :
978-1-4577-1344-6
