• DocumentCode
    559765
  • Title

    Integration of 45° micromirror in single-mode waveguide

  • Author

    Inoue, Junichi ; Ogura, Tomonori ; Kintaka, Kenji ; Nishio, Kenzo ; Awatsuji, Yasuhiro ; Ura, Shogo

  • Author_Institution
    Kyoto Inst. of Technol., Kyoto, Japan
  • fYear
    2011
  • fDate
    Oct. 30 2011-Nov. 2 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Micromirrors for high-density coupling between guided waves and free-space waves were integrated in dielectric-glass planar waveguides by using dry etching of trenches and tilt exposure for 45-degree tapers in the water. Input and output coupling efficiencies were experimentally estimated to be 75 % and 60 %, respectively.
  • Keywords
    etching; germanium compounds; micromirrors; optical couplers; optical fabrication; optical glass; optical planar waveguides; silicon compounds; SiO2-GeO2:SiO2-SiO2; dielectric glass planar waveguides; dry etching; free space waves; guided waves; high density coupling; micromirror; single mode waveguide; Charge coupled devices; Couplers; Gold; Micromirrors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microopics Conference (MOC), 2011 17th
  • Conference_Location
    Sendai
  • Print_ISBN
    978-1-4577-1344-6
  • Type

    conf

  • Filename
    6110319
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=559765