• DocumentCode
    559781
  • Title

    Lithium niobate membrane on silicon platform for waveguide sensor

  • Author

    Mochizuki, Eiki ; Muranaka, Yusuke ; Kurimura, Sunao ; Kikuchi, Kiyofumi ; Terasaki, Akihiro ; Nakajima, Hirochika

  • Author_Institution
    Nat. Inst. for Mater. Sci. (NIMS), Tsukuba, Japan
  • fYear
    2011
  • fDate
    Oct. 30 2011-Nov. 2 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.
  • Keywords
    elemental semiconductors; etching; lithium compounds; magnesium; membranes; optical fabrication; optical materials; optical sensors; optical waveguides; silicon; LiNbO3:Mg-Si; cladless nonlinear optical waveguide; etching; high-sensitivity light-fluid interaction; membrane; size 4 mum; waveguide sensor; Interference; Lead; Noise; Nonlinear optics; Optical polarization; Optical waveguides; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microopics Conference (MOC), 2011 17th
  • Conference_Location
    Sendai
  • Print_ISBN
    978-1-4577-1344-6
  • Type

    conf

  • Filename
    6110335
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=559781