Title :
Lithium niobate membrane on silicon platform for waveguide sensor
Author :
Mochizuki, Eiki ; Muranaka, Yusuke ; Kurimura, Sunao ; Kikuchi, Kiyofumi ; Terasaki, Akihiro ; Nakajima, Hirochika
Author_Institution :
Nat. Inst. for Mater. Sci. (NIMS), Tsukuba, Japan
fDate :
Oct. 30 2011-Nov. 2 2011
Abstract :
Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.
Keywords :
elemental semiconductors; etching; lithium compounds; magnesium; membranes; optical fabrication; optical materials; optical sensors; optical waveguides; silicon; LiNbO3:Mg-Si; cladless nonlinear optical waveguide; etching; high-sensitivity light-fluid interaction; membrane; size 4 mum; waveguide sensor; Interference; Lead; Noise; Nonlinear optics; Optical polarization; Optical waveguides; Silicon;
Conference_Titel :
Microopics Conference (MOC), 2011 17th
Conference_Location :
Sendai
Print_ISBN :
978-1-4577-1344-6
