Title :
Evaluation of cofired platinum /alumina high density feedthrough for implantable neurostimulator applications
Author :
Karbasi, Ali ; Jones, W. Kinzy
Author_Institution :
Dept. of Mech. & Mater. Eng., Florida Int. Univ., Miami, FL, USA
Abstract :
This work evaluated materials and process interactions in the development of a high density platinum / alumina feedthrough. Effect of Pt particle size, firing rates, firing temperature on the sintering, densification and secondary reactions are evaluated, as well as the effect of alumina additive to minimize the difference in expansion coefficient during cooling.
Keywords :
additives; alumina; cooling; densification; firing (materials); ion implantation; particle size; platinum; sintering; Pt particle size; Pt-Al2O3; alumina additive; cofired platinum/alumina; cooling; densification; expansion coefficient; firing rates; firing temperature; high density feedthrough; implantable neurostimulator; process interactions; secondary reactions; sintering; Heating; Ink; Metallization; Biocompatible; Hermetic device; High density feedthrough; Implantable neurostimulator;
Conference_Titel :
Microelectronics and Packaging Conference (EMPC), 2011 18th European
Conference_Location :
Brighton
Print_ISBN :
978-1-4673-0694-2