DocumentCode :
561029
Title :
Additive photolithography based process for metal patterning using chemical reduction on surface modified polyimide
Author :
Watson, David E. ; Ng, Jack H -G ; Desmulliez, Marc P Y
Author_Institution :
Microsyst. Eng. Centre (MISEC), Heriot Watt Univ., Edinburgh, UK
fYear :
2011
fDate :
12-15 Sept. 2011
Firstpage :
1
Lastpage :
7
Abstract :
This article presents progress towards the direct metallisation of polyimide via silver ion impregnation and nanocluster formation using a novel solvent free photoresist prior to electroless silver plating. Such a process is envisaged to play a major part in the fabrication of a wide range of electronic devices, such as RFID, flexible electronics, biomedical applications, OLED, e-paper and flip-chip bonding applications by providing a quicker, greener and more cost effective methods of polymer electronics production. A new method involving the chemical reduction of silver ions is presented here providing a comparison to previous UV photoreduction experiments, and a further test for electrolessly plated microstructures.
Keywords :
photoresists; reduction (chemical); semiconductor device metallisation; OLED; RFID; UV photoreduction experiments; additive photolithography; biomedical applications; chemical reduction; e-paper bonding applications; electroless plated microstructures; electroless silver plating; electronic devices; flexible electronics; flip-chip bonding applications; metal patterning; nanocluster formation; polyimide direct metallisation; polymer electronics production; silver ion impregnation; solvent free photoresist; surface modified polyimide; Chemicals; Ions; Polyimides; Resists; Silver; Substrates; Electroless plating; Manufacturing Processes; Metallisation; Polyimide; Polymer Electronics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics and Packaging Conference (EMPC), 2011 18th European
Conference_Location :
Brighton
Print_ISBN :
978-1-4673-0694-2
Type :
conf
Filename :
6142411
Link To Document :
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