Title :
CMOS image sensor on microcavities and local SOI-structures
Author :
Druzhinin, Anatolij ; Holota, Victor ; Kogut, Igor ; Dovgyj, Victor ; Khoverko, Yuriy
Author_Institution :
Lviv Polytechnik Nat. Univ., Lviv, Ukraine
Abstract :
The structure of sensor images on “silicon-oninsulator” local structures is proposed and possibility of monolithic integration of sensing elements and signal processing systems is shown.
Keywords :
CMOS image sensors; microcavities; monolithic integrated circuits; silicon-on-insulator; CMOS image sensor; local SOl structure; microcavity; monolithic integration; sensing element; signal processing system; silicon-on-insulator; CMOS integrated circuits; Cavity resonators; Solids; Switches; Transistors; SOI-structure; image sensor; microcavities; monolithic integration; sensor element;
Conference_Titel :
Modern Problems of Radio Engineering Telecommunications and Computer Science (TCSET), 2012 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-1-4673-0283-8
