Mems-based wide range tunable Fabry Perot filter

Author

Krishna Chennakesava, Rao M. ; Priya, M. Shanmuga ; Meenakshi, M. ; Kalaiarasi, A.R.

Author_Institution

Dept. of Electron. & Commun. Eng., Anna Univ., Chennai, India

fYear

2012

fDate

30-31 March 2012

Firstpage

266

Lastpage

268

Abstract

This paper describes the MEMS based wavelength tunable optical filter that uses Fabry Perot cavity and fixed-fixed beam electrostatic actuator. The filter operates in all O, E, S, C, L, U bands. It can also be used in hyper spectral imaging applications. This is a hybrid optical filter which combines fiber optics and micro electromechanical systems (MEMS) technologies. The filter is modeled and simulated for the tunable range from 1157nm to 2500nm. The tunability is achieved by varying gap (d) between the mirrors of Fabry Perot cavity. The length of the cavity is varied by using electrostatic actuation. The Fabry Perot filter is modeled using INTELLISUITE software and the optical analysis is done by MATLAB.

Keywords

Fabry-Perot resonators; electrostatic actuators; micromirrors; optical fibre filters; C band; E band; Fabry Perot cavity; Fabry Perot filter; INTELLISUITE software; L band; MATLAB; O band; S band; U band; fiber optics; fixed-fixed beam electrostatic actuator; hybrid optical filter; hyper spectral imaging; microelectromechanical systems; mirrors; wavelength 1157 nm to 2500 nm; wavelength tunable optical filter; Electrodes; Optical device fabrication; Optical films; Optical filters; Optical reflection; Reliability; Fabry Perot; MEMS; Optical filter; fixed beam Electrostatic actuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Advances in Engineering, Science and Management (ICAESM), 2012 International Conference on

Conference_Location

Nagapattinam, Tamil Nadu

Print_ISBN

978-1-4673-0213-5

Type

conf

Filename

6216012