Title :
Mems-based wide range tunable Fabry Perot filter
Author :
Krishna Chennakesava, Rao M. ; Priya, M. Shanmuga ; Meenakshi, M. ; Kalaiarasi, A.R.
Author_Institution :
Dept. of Electron. & Commun. Eng., Anna Univ., Chennai, India
Abstract :
This paper describes the MEMS based wavelength tunable optical filter that uses Fabry Perot cavity and fixed-fixed beam electrostatic actuator. The filter operates in all O, E, S, C, L, U bands. It can also be used in hyper spectral imaging applications. This is a hybrid optical filter which combines fiber optics and micro electromechanical systems (MEMS) technologies. The filter is modeled and simulated for the tunable range from 1157nm to 2500nm. The tunability is achieved by varying gap (d) between the mirrors of Fabry Perot cavity. The length of the cavity is varied by using electrostatic actuation. The Fabry Perot filter is modeled using INTELLISUITE software and the optical analysis is done by MATLAB.
Keywords :
Fabry-Perot resonators; electrostatic actuators; micromirrors; optical fibre filters; C band; E band; Fabry Perot cavity; Fabry Perot filter; INTELLISUITE software; L band; MATLAB; O band; S band; U band; fiber optics; fixed-fixed beam electrostatic actuator; hybrid optical filter; hyper spectral imaging; microelectromechanical systems; mirrors; wavelength 1157 nm to 2500 nm; wavelength tunable optical filter; Electrodes; Optical device fabrication; Optical films; Optical filters; Optical reflection; Reliability; Fabry Perot; MEMS; Optical filter; fixed beam Electrostatic actuator;
Conference_Titel :
Advances in Engineering, Science and Management (ICAESM), 2012 International Conference on
Conference_Location :
Nagapattinam, Tamil Nadu
Print_ISBN :
978-1-4673-0213-5
