Title :
Regimes of energy input in the pseudospark discharge in the sources of EUV radiation
Author :
Korolev, Yu.D. ; Frants, O.B. ; Geyman, V.G. ; Ivashov, R.V. ; Landl, N.V. ; Shemyakin, A.
Author_Institution :
Institute of High Current Electronics, 4 Akademichesky Ave., 634055 Tomsk, Russia
Abstract :
The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.
Conference_Titel :
High-Power Particle Beams (BEAMS), 2002 14th International Conference on
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
978-0-7354-0107-5
