• DocumentCode
    563338
  • Title

    Regimes of energy input in the pseudospark discharge in the sources of EUV radiation

  • Author

    Korolev, Yu.D. ; Frants, O.B. ; Geyman, V.G. ; Ivashov, R.V. ; Landl, N.V. ; Shemyakin, A.

  • Author_Institution
    Institute of High Current Electronics, 4 Akademichesky Ave., 634055 Tomsk, Russia
  • Volume
    2
  • fYear
    2002
  • fDate
    23-28 June 2002
  • Firstpage
    149
  • Lastpage
    152
  • Abstract
    The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.
  • Keywords
    Anodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    High-Power Particle Beams (BEAMS), 2002 14th International Conference on
  • Conference_Location
    Albuquerque, NM, USA
  • ISSN
    0094-243X
  • Print_ISBN
    978-0-7354-0107-5
  • Type

    conf

  • Filename
    6219532
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=563338