Title :
Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation
Author :
Korolev, Yu.D. ; Datsko, I.M. ; Frants, O.B. ; Geyman, V.G. ; Ivashov, R.V. ; Landl, N.V. ; Shemyakin, I.A.
Author_Institution :
Institute of High Current Electronics, 4 Akademichesky Ave., 634055 Tomsk, Russia
Abstract :
The paper describes the main features of the experimental installation for investigation of a high current pulsed gas discharge, which burns in typical conditions of EUV source operation.
Conference_Titel :
High-Power Particle Beams (BEAMS), 2002 14th International Conference on
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
978-0-7354-0107-5
