DocumentCode :
563415
Title :
Fiber-optics coupled detector arrays using thin film cadmium sulfide Schottky diodes
Author :
Palmer, John P.
Author_Institution :
California State Polytech. Univ., Pomona, CA, USA
fYear :
1974
fDate :
9-11 Dec. 1974
Firstpage :
67
Lastpage :
68
Abstract :
Epitaxial films of cadmium sulfide grown on silicon and on germanium are used as the basis for Pt-CdS photovoltaic Schottky diodes. The CdS films are vacuum deposited using a resistance heated source and an alumina crucible. The rate of deposition is approximately 300 Angstroms per minute, and the substrate temperature during deposition is 275°C. The platinum films are deposited from a second, tungsten, resistance heated source at a rate of about 7 Angstroms per minute. The thicknesses of the CdS and Pt films are typically 1 micron and 40 Angstroms, respectively. Electrical contact to the platinum electrode is made by thermocompression bonding gold wire to an aluminum pad deposited on the platinum.
Keywords :
II-VI semiconductors; Schottky diodes; alumina; cadmium compounds; electrical contacts; elemental semiconductors; fibre optic sensors; germanium; lead bonding; platinum; semiconductor epitaxial layers; semiconductor growth; semiconductor thin films; sensor arrays; silicon; vacuum deposited coatings; wide band gap semiconductors; Ge; Pt-CdS; Si; alumina crucible; aluminum pad deposition; electrical contact; epitaxial films; fiber-optics coupled detector arrays; gold wire; photovoltaic Schottky diodes; platinum electrode; resistance heated source; size 1 micron; temperature 275 degC; thermocompression bonding; thin film cadmium sulfide Schottky diodes; vacuum deposition; Optical detectors; Optical fiber sensors; Optical fibers; Optical films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting (IEDM), 1974 International
Conference_Location :
Washington, DC
ISSN :
0163-1918
Type :
conf
DOI :
10.1109/IEDM.1974.6219613
Filename :
6219613
Link To Document :
بازگشت