DocumentCode
563568
Title
Calculation of ion beam sputtering yield of solid sample with cylindrical cavities on its surface
Author
Bondarenko, G.G. ; Kristya, V.L. ; Prassitski, V.V.
Author_Institution
Moscow Institute of Electronics and Mathematics, 3/12 B. Trekhsviatitelskiy per., 109028, Russia
fYear
2000
fDate
20-25 June 2000
Firstpage
560
Lastpage
562
Abstract
Analytical expressions which determine the fraction of sputtered atoms escaping from a cylindrical cavity on the target surface bombarded by an ion beam are obtained for their cosine and over-cosine angle distributions. It is shown that the sputtering yield can be substantially reduced by creation a relief of cylindrical cavities on the sputtered surface.
Keywords
Solids; cylindrical cavities; sputtering; surface relief;
fLanguage
English
Publisher
ieee
Conference_Titel
High-Power Particle Beams, 2000 13th International Conference on
Conference_Location
Nagaoka, Japan
Type
conf
Filename
6219932
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