Title :
Calculation of ion beam sputtering yield of solid sample with cylindrical cavities on its surface
Author :
Bondarenko, G.G. ; Kristya, V.L. ; Prassitski, V.V.
Author_Institution :
Moscow Institute of Electronics and Mathematics, 3/12 B. Trekhsviatitelskiy per., 109028, Russia
Abstract :
Analytical expressions which determine the fraction of sputtered atoms escaping from a cylindrical cavity on the target surface bombarded by an ion beam are obtained for their cosine and over-cosine angle distributions. It is shown that the sputtering yield can be substantially reduced by creation a relief of cylindrical cavities on the sputtered surface.
Keywords :
Solids; cylindrical cavities; sputtering; surface relief;
Conference_Titel :
High-Power Particle Beams, 2000 13th International Conference on
Conference_Location :
Nagaoka, Japan
