Synthesis of Ti-Al intermetallic compounds films by intense pulsed ion-beam evaporation

In order to examine the possibility of the synthesis of an intermetallic compound thin film by ion beam evaporation (IBE), the synthesis of a Ti-Al system intermetallic compound thin film was tried. The crystal structure and composition of the film were evaluated. By using combined target of Ti and Al, thin film of single phase was not observed. By using alloy target, the Ti3Al film was formed successfully. The Ti3Al film has been orientated in the (002) plane. The orientation to the (002) plane was strengthened by heating the substrate.