Novel large-area high-resolution-transmission-electron-microscopy technique using FIB-fabricated specimens

A novel LA-HRTEM specimen fabrication technique using an FIB apparatus was developed. Using this technique, cation composition in a K-Al-Si-Sn-Ti-Zr-O specimen was performed by EDS. The cation composition of regions located more than 200 nm apart from the interface between a ZrO2 grain and SiO2 matrix was same as that in ZrO2 and SiO2. This indicates that the accuracy of EDS analyses in the LA-HRTEM specimens was confirmed.