Research on the correlation between surface morphology and bombardment energy of ar ion to substrates in Fe films prepared by ion beam sputtering

The surface morphology of the Fe films have been investigated in detail by controlling the condition of a dual ion beam sputtering. The voltage for Ar bombardment VA was varied in the range of 80–2000 V. The surface morphology and the roughness of the film apparently depended on VA. The roughness parameter Ra on the film surface was sensitive on VA, and was in the range between 0.5 and 15 nm. The temperature near the bombarded position on the film surface, which was calculated by heat equation reached the melting point of Fe at VA in the range from l00 to 200 V. This model of the thermal spike may estimate the optimum condition of ion bombardment for Fe film deposition.