Title :
Characteristics of CrN films prepared by pulsed laser deposition
Author :
Hirai, M. ; Ueno, Y. ; Suzuki, T. ; Jiang, W. ; Grigoriu, C. ; Yatsui, K.
Author_Institution :
Extreme Energy-Density Research Institute, Nagaoka University of Technology, Niigata 940-2188, Japan
Abstract :
Chromium nitride (CrN) films have been successfully prepared by pulsed laser deposition (PLD). Experiment was carried out by changing the substrate temperature from R.T. to 600°C. The hardness of the films increased gradually with an increase in the substrate temperature up to 400°C, above which it decreased rapidly. Furthermore, the maximum value was HV∼2000. The rapid decrease in the hardness induced at the formation of ellipsoidal grains. The boundaries of these grains seem to be structural defect.
Keywords :
Atmospheric measurements; Lasers; Nitrogen; Particle measurements; Substrates; Surface treatment; Temperature measurement; CrN; grain; hardness; thin film;
Conference_Titel :
High-Power Particle Beams, 2000 13th International Conference on
Conference_Location :
Nagaoka, Japan
