DocumentCode
563948
Title
Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams
Author
Struts, Vasily K. ; Matvienko, Vasily M. ; Ryabchikov, Alexandr I. ; Petrov, Anatoli V. ; Shlapakovski, Anatoli S.
Author_Institution
Nucl. Phys. Inst., Tomsk Polytech. Univ., Tomsk, Russia
fYear
2004
fDate
18-23 July 2004
Firstpage
643
Lastpage
646
Abstract
The films of titanium and carbon deposited onto silicon and α-Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.
Keywords
adhesion; carbon; ion beam assisted deposition; metallic thin films; plasticity; titanium; α-Fe substrates; C; Fe; Si; Ti; ablated target; accelerator shots; adhesion strength; coating characteristics; coating plasticity; deposition conditions; film thickness; high-power ion beams; silicon substrates; thin-film coatings; Adhesives; Focusing; Iron; Silicon; Substrates; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
High-Power Particle Beams (BEAMS 2004), 2004 International Conference on
Conference_Location
St. Petersburg
Print_ISBN
978-5-87911-088-3
Type
conf
Filename
6220627
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