Title :
Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams
Author :
Struts, Vasily K. ; Matvienko, Vasily M. ; Ryabchikov, Alexandr I. ; Petrov, Anatoli V. ; Shlapakovski, Anatoli S.
Author_Institution :
Nucl. Phys. Inst., Tomsk Polytech. Univ., Tomsk, Russia
Abstract :
The films of titanium and carbon deposited onto silicon and α-Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.
Keywords :
adhesion; carbon; ion beam assisted deposition; metallic thin films; plasticity; titanium; α-Fe substrates; C; Fe; Si; Ti; ablated target; accelerator shots; adhesion strength; coating characteristics; coating plasticity; deposition conditions; film thickness; high-power ion beams; silicon substrates; thin-film coatings; Adhesives; Focusing; Iron; Silicon; Substrates; Thickness measurement;
Conference_Titel :
High-Power Particle Beams (BEAMS 2004), 2004 International Conference on
Conference_Location :
St. Petersburg
Print_ISBN :
978-5-87911-088-3
