DocumentCode
564752
Title
CO2 laser machining of fully packaged autonomous microfluidic systems
Author
Mohammed, M.I. ; Desmulliez, M.P.Y.
Author_Institution
Microsyst. Eng. Centre (MISEC), Heriot-Watt Univ., Edinburgh, UK
fYear
2012
fDate
25-27 April 2012
Firstpage
63
Lastpage
70
Abstract
In this article we demonstrate a simple yet robust CO2 -laser etching rapid prototyping technique for the construction of autonomous microfluidic capillary systems. The final packaging of the microfluidic device is demonstrated using both thermal and adhesive based lamination bonding and allows for a turnaround time of approximately 30 minutes to 3 hours from activation of the laser system to device use. The low-cost CO2 laser system is capable of producing repeatable microfluidic structures with minimum feature sizes superior than 100–150µm over channel depths of more than 150µm. This system is utilised to create capillary pump and valve designs within poly(methyl methacrylate) (PMMA) substrates. Such components are utilised to create advanced systems that can self initiate and maintain the flow of various volumes of fluids from an input to a collection reservoir, whilst also controlling the progression of the flow through the various simple and advanced valve type structures demonstrated. Such systems could prove a very useful alternative to traditional, non-integrated, fluidic actuation and flow control systems found on-chip, which generally require some form of energy input, have limited portable capabilities and require more complex fabrication procedures.
Keywords
Etching; Fluids; Geometry; Microfluidics; Pumps; Substrates; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location
Cannes, France
Print_ISBN
978-1-4673-0785-7
Type
conf
Filename
6235292
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