Characterization of damping in vibrating microplates through measurements in the time domain

Author

De Pasquale, Giorgio ; Somá, Aurelio

Author_Institution

Dept. of Mech. & Aerosp. Eng., Politec. di Torino, Turin, Italy

fYear

2012

fDate

25-27 April 2012

Firstpage

76

Lastpage

81

Abstract

This paper reports a study about the measurement of damping in microplates for MEMS applications as switches, varactors, transceivers, radio frequency devices and energy harvesters. Through the measurement of applied force and displacement in the time domain, the hysteresis curve is obtained; by using an energetic approach, the dissipative effects acting on the structure are derived and the damping coefficient is estimated. The results are compared with damping values obtained with two alternative experimental strategies: the response decay to a step force and the half power method applied to the frequency response function.

Keywords

damping; displacement measurement; energy harvesting; force measurement; frequency response; microswitches; time-domain analysis; transceivers; varactors; MEMS applications; damping characterization; damping values; displacement measurement; dissipative effects; energetic approach; energy harvesters; force measurement; frequency response function; half power method; radiofrequency devices; response decay; step force; switches; time domain; transceivers; varactors; vibrating microplates; Damping; Force; Force measurement; Frequency measurement; Hysteresis; Micromechanical devices; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on

Conference_Location

Cannes

Print_ISBN

978-1-4673-0785-7

Type

conf

Filename

6235304