Title :
Polymer MOEMS mirror by all vacuum-less processes combining printed film and injection molding replication
Author :
Kurihara, Kazuma ; Takagi, Hideki ; Maeda, Ryutaro
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
A MOEMS mirror device was fabricated by only replication process and transfer of screen printed-MEMS functional layer from a PET film. The polymer-MEMS device consists with a mirror surface, a magnetic ink and a strain gauge sensor. Using the thick membrane for the mirror part, the deformation of the mirror surface was kept to optical flat. In contrast, the thin membrane of the spring part could allow large tilt angle in low-magnetic force. The tilt angle was evaluated to be 30 degree when the magnetic force was operated to be 55 gauss. In addition, by detecting the strain sensor signal, the actuated frequency of the polymer-mirror device was controlled to resonance condition. We consider that the developed process has a potential to attain a MEMS device production in a low-cost and a high-throughput under all-vacuumless atmosphere.
Keywords :
injection moulding; magnetic fluids; magnetic forces; micro-optomechanical devices; micromirrors; strain gauges; strain sensors; PET film; injection molding replication; low-magnetic force; magnetic ink; mirror surface; optical flat; polymer MOEMS mirror; polymer-MEMS device; printed film; resonance condition; screen printed-MEMS functional layer; strain gauge sensor; strain sensor signal detection; thick membrane; thin membrane; tilt angle; vacuum-less processes; Fabrication; Films; Ink; Micromechanical devices; Mirrors; Polymers; Strain;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
