Polymer MOEMS mirror by all vacuum-less processes combining printed film and injection molding replication

A MOEMS mirror device was fabricated by only replication process and transfer of screen printed-MEMS functional layer from a PET film. The polymer-MEMS device consists with a mirror surface, a magnetic ink and a strain gauge sensor. Using the thick membrane for the mirror part, the deformation of the mirror surface was kept to optical flat. In contrast, the thin membrane of the spring part could allow large tilt angle in low-magnetic force. The tilt angle was evaluated to be 30 degree when the magnetic force was operated to be 55 gauss. In addition, by detecting the strain sensor signal, the actuated frequency of the polymer-mirror device was controlled to resonance condition. We consider that the developed process has a potential to attain a MEMS device production in a low-cost and a high-throughput under all-vacuumless atmosphere.