Title :
Gas thermal conductivity measurement using a 3ω based sensor
Author :
Gauthier, Sébastian ; Giani, Alain ; Combette, Philippe
Author_Institution :
Inst. d´´Electron. Sud, Univ. Montpellier II, Montpellier, France
Abstract :
The 3ω method has been extensively used to characterize thermal properties of various type of samples: dielectric solids, superlattices, thin films, liquids, nanofluids, etc. However, only few works were dedicated to study samples in the gas state using this technique. In this focus, we present a new approach based on a 3ω method, to measure the thermal conductivity of gas samples. Our sensing element is a micro-machined platinum wire, which has been suspended in the gas under characterization.
Keywords :
electric sensing devices; thermal conductivity measurement; 3ω based sensor; gas thermal conductivity measurement; micromachined platinum wire; Conductivity; Conductivity measurement; Heating; Resistance; Temperature measurement; Thermal conductivity; Wires;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
